[Other] Review—Atomic Layer Deposition of Silicon Dioxide Thin Films

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susmitbasu Post time 2024-4-26 22:47:48 | Show all posts |Read mode

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journal：ECS Journal of Solid State Science and Technology

Authors：Vladislav Yu. Vasilyev

Published date：2021-5-1

DOI：10.1149/2162-8777/abffab

PDF link：https://iopscience.iop.org/article/10.1149/2162-8777/abffab

Article link：http://dx.doi.org/10.1149/2162-8777/abffab

Article Source：The Electrochemical Society。

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[Other] Review—Atomic Layer Deposition of Silicon Dioxide Thin Films Copy