A Piezoelectric MEMS Resonant Temperature Sensor with 10-μk Resolution and 0.06-PJK2 Resolution FOM

Post time 2024-4-25 15:52:36

journal：2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)

Authors：Ye Yuan; Hexu Luo; Yi Gong; Boyun Zhang; Haolin Li; Wei Pang; Quanning Li; Mingchao Sun; Menglun Zhang

Published date：2024-1-21

DOI：10.1109/mems58180.2024.10439359

PDF link：https://ieeexplore.ieee.org/stampPDF/getPDF.jsp?arnumber=10439359

Article link：http://dx.doi.org/10.1109/mems58180.2024.10439359

Article Source：IEEE。

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Post time 2024-4-25 15:52:37

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