[Elsevier] Internal stresses in metallic films deposited by cylindrical magnetron sputtering

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nepia99 Post time 2024-4-25 12:42:27 | Show all posts |Read mode
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Internal stresses in metallic films deposited by cylindrical magnetron sputteringJohn A. Thornton, Jack Tabock, D.W. Hoffman
Thin Solid Films. Volume 64, Issue 1, 15 November 1979, Pages 111-119
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