[SPIE]
Improved waveguide surface roughness by foundry-processing techniques for enhanced light delivery to integrated ion trap for quantum computing platforms
Authors£ºSimon Chun Kiat Goh; Adrian Utama; Haitao Yu; Yan Yan Zhou; Mishra Dileep; Clarence Liu; Morteza Ahmadi; Victor Leong; Manas Mukherjee; Chui King-Jien; Hongyu Li