Estimation of critical dimension and line edge roughness using a neural network

Post time 2024-4-23 20:56:56

journal：Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Authors：Dehua Li; Soo-Young Lee; Jin Choi; Seom-Beom Kim; Chan-Uk Jeon

Published date：2021-5-1

DOI：10.1116/6.0000806

PDF link：https://pubs.aip.org/avs/jvb/art ... 032602_1_online.pdf

Article link：http://dx.doi.org/10.1116/6.0000806

Article Source：American Vacuum Society。

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Post time 2024-4-23 20:56:57

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