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[IOP] Physics-separating artificial neural networks for predicting sputtering and thin film deposition of AlN in Ar/N2 discharges on experimental timescales

stefamaru Post time 2024-4-23 16:32:47 | Show all posts |Read mode
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journal£ºJournal of Physics D: Applied Physics

Authors£ºTobias Gergs; Thomas Mussenbrock; Jan Trieschmann

Published date£º2023-5-11

DOI£º10.1088/1361-6463/acc07e

PDF link£ºhttps://iopscience.iop.org/article/10.1088/1361-6463/acc07e

Article link£ºhttp://dx.doi.org/10.1088/1361-6463/acc07e

Article Source£ºIOP Publishing¡£


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Akoni01S22 Junior Member
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Akoni01S22 Post time 2024-4-23 16:32:48 | Show all posts

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