journal£ºPlasma Sources Science and Technology
Authors£ºS T Kosonen; T Kalvas; V Toivanen; O Tarvainen; D Faircloth
Published date£º2023-7-1
DOI£º10.1088/1361-6595/ace0d7
PDF link£ºhttps://iopscience.iop.org/article/10.1088/1361-6595/ace0d7
Article link£ºhttp://dx.doi.org/10.1088/1361-6595/ace0d7
Article Source£ºIOP Publishing¡£
Remark£º |