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[Other] Effects of magnetic field gradient on capacitively coupled plasma driven by tailored voltage waveforms

joulany Post time 2024-4-20 20:13:06 | Show all posts |Read mode
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journal£ºJournal of Vacuum Science & Technology A

Authors£ºHuanhuan Wu; Minghan Yan; Hao Wu; Shali Yang

Published date£º2024-5-1

DOI£º10.1116/6.0003324

PDF link£ºhttps://pubs.aip.org/avs/jva/art ... 003_1_6.0003324.pdf

Article link£ºhttp://dx.doi.org/10.1116/6.0003324

Article Source£ºAmerican Vacuum Society¡£


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Eleotris Junior Member
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Eleotris Post time 2024-4-20 20:13:07 | Show all posts

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