Morphological and electrical properties of Nickel based Ohmic contacts formed by laser annealing process on n-type 4H-SiC

Post time 2024-4-20 19:30:42

journal：Materials Science in Semiconductor Processing

Authors：S. Rascunà; P. Badalà; C. Tringali; C. Bongiorno; E. Smecca; A. Alberti; S. Di Franco; F. Giannazzo; G. Greco; F. Roccaforte; M. Saggio

Published date：2019-7-

DOI：10.1016/j.mssp.2019.02.031

PDF link：https://www.sciencedirect.com/sc ... 369800118321966/pdf

Article link：http://dx.doi.org/10.1016/j.mssp.2019.02.031

Article Source：Elsevier BV。

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