journal£ºJournal of Vacuum Science & Technology A
Authors£ºGeorge H. Major; Vincent Fernandez; Neal Fairley; Emily F. Smith; Matthew R. Linford
Published date£º2022-12-1
DOI£º10.1116/6.0001975
PDF link£ºhttps://pubs.aip.org/avs/jva/art ... 063201_1_online.pdf
Article link£ºhttp://dx.doi.org/10.1116/6.0001975
Article Source£ºAmerican Vacuum Society¡£
Remark£º |