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[SPIE] Review and future perspective of feature scale profile modeling for high-performance semiconductor devices

koyomi Post time 2024-4-16 04:29:01 | Show all posts |Read mode
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journal£ºJournal of Micro/Nanopatterning, Materials, and Metrology

Authors£ºNobuyuki Kuboi

Published date£º2023-11-22

DOI£º10.1117/1.jmm.22.4.041502

PDF link£ºhttps://www.spiedigitallibrary.o ... 2f1.JMM.22.4.041502

Article link£ºhttp://dx.doi.org/10.1117/1.jmm.22.4.041502

Article Source£ºSPIE-Intl Soc Optical Eng¡£


Remark£º

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Dragon2000 Senior Member
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