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[SPIE] Absorption coefficient of metal-containing photoresists in the extreme ultraviolet

liuzhencc Post time 2022-8-12 15:35:05 | Show all posts |Read mode
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journal£ºJournal of Micro/Nanolithography, MEMS, and MOEMS

Authors£ºRoberto Fallica; Jarich Haitjema; Lianjia Wu; Sonia Castellanos; Albert M. Brouwer; Yasin Ekinci

Published date£º2018-5-10

DOI£º10.1117/1.jmm.17.2.023505

Article link£ºhttp://dx.doi.org/10.1117/1.jmm.17.2.023505

Article Source£ºSPIE-Intl Soc Optical Eng¡£


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David Junior Member
2022-8-12
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David Post time 2022-8-12 15:35:06 | Show all posts

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