[IOP] Analysis and wafer-level design of a high-order silicon vibration isolator for resonating MEMS devices

charles_zsq Post time 2022-8-5 21:00:47 | Show all posts |Read mode
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Article link: Analysis and wafer-level design of a high-order silicon vibration isolator for resonating MEMS devices - IOPscience

Article author: Sang Won Yoon, Sangwoo Lee, Noel C Perkins and Khalil Najafi

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