journal£ºJournal of Micromechanics and Microengineering
Authors£ºR Scott Downen; Quan Dong; Julius Lee Chen; Zhenyu Li
Published date£º2023-11-1
DOI£º10.1088/1361-6439/acf8d2
PDF link£ºhttps://iopscience.iop.org/article/10.1088/1361-6439/acf8d2
Article link£ºhttp://dx.doi.org/10.1088/1361-6439/acf8d2
Article Source£ºIOP Publishing
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