journal£ºJournal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Authors£ºJatinder Kaur; Ravish K. Jain; Atul Khanna; Amit K. Chawla
Published date£º2021-5-1
DOI£º10.1116/6.0001026
PDF link£ºhttps://pubs.aip.org/avs/jvb/art ... 032205_1_online.pdf
Article link£ºhttp://dx.doi.org/10.1116/6.0001026
Article Source£ºAmerican Vacuum Society¡£
Remark£º |