Advancements in MOCVD technology for low cost high quality epitaxy

Post time 2024-5-6 15:38:22

journal：Light-Emitting Devices, Materials, and Applications XXVIII

Authors：Jared Holzwarth; Ilio Miccoli; Adam R. Boyd; Thomas Korst; Michael Heuken

Published date：2024-3-13

DOI：10.1117/12.3000724

Article link：http://dx.doi.org/10.1117/12.3000724

Article Source：SPIE。

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Post time 2024-5-6 15:38:23

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[SPIE] Advancements in MOCVD technology for low cost high quality epitaxy

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