[Other] Dilute HF Solutions for Copper Cleaning during BEOL Processes: Effect of Aeration on Selectivity and Copper Corrosion

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sunglin Post time 2024-5-6 13:53:44 | Show all posts |Read mode
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journal£ºECS Transactions

Authors£ºDinesh Padmanabhan Ramalekshmi Thanu; Nandini Venkataraman; Srini Raghavan; Omid Mahdavi

Published date£º2009-9-25

DOI£º10.1149/1.3202642

PDF link£ºhttps://iopscience.iop.org/article/10.1149/1.3202642/pdf

Article link£ºhttp://dx.doi.org/10.1149/1.3202642

Article Source£ºThe Electrochemical Society¡£


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