[Elsevier] First-principles study of copper contamination in silicon semiconductor

mar.e.s.p.io@g Post time 2024-5-1 15:30:32 | Show all posts |Read mode
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journal£ºSurfaces and Interfaces

Authors£ºPei Chen; Yadong Li; Fei Qin; Tong An; Yanwei Dai; Min Zhang; Minghui Liu; Lipeng Zhang

Published date£º2022-7-

DOI£º10.1016/j.surfin.2022.102084

PDF link£ºhttps://www.sciencedirect.com/sc ... 468023022003522/pdf

Article link£ºhttp://dx.doi.org/10.1016/j.surfin.2022.102084

Article Source£ºElsevier BV¡£


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