journal£ºJournal of Micromechanics and Microengineering
Authors£ºHongbin An; Liangzhou Chen; Xiaojun Liu; Xiangyang Wang; Yunfeng Liu; Zhigang Wu; Bin Zhao; Hong Zhang
Published date£º2021-3-1
DOI£º10.1088/1361-6439/abd8e0
PDF link£ºhttps://iopscience.iop.org/article/10.1088/1361-6439/abd8e0
Article link£ºhttp://dx.doi.org/10.1088/1361-6439/abd8e0
Article Source£ºIOP Publishing¡£
Remark£º |