[Elsevier] Diffusivity and solubility of HF gas in polymers and nanocomposites used for automated handling containers of silicon substrates in microelectronic industry

sunglin Post time 2024-4-29 14:02:57 | Show all posts |Read mode
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journal£ºMicroelectronic Engineering

Authors£ºMinh-Phuong Tran; Carlos Beitia; Sung-In Moon; Jorgen Lundgren; Alissa Wild; Herv¨¦ Fontaine; Paola Gonzalez-Aguirre

Published date£º2023-1-

DOI£º10.1016/j.mee.2022.111910

PDF link£ºhttps://www.sciencedirect.com/sc ... 167931722002040/pdf

Article link£ºhttp://dx.doi.org/10.1016/j.mee.2022.111910

Article Source£ºElsevier BV¡£


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mraar19 Post time 2024-4-29 14:02:58 | Show all posts

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