journal£ºMicroelectronic Engineering
Authors£ºMinh-Phuong Tran; Carlos Beitia; Sung-In Moon; Jorgen Lundgren; Alissa Wild; Herv¨¦ Fontaine; Paola Gonzalez-Aguirre
Published date£º2023-1-
DOI£º10.1016/j.mee.2022.111910
PDF link£ºhttps://www.sciencedirect.com/sc ... 167931722002040/pdf
Article link£ºhttp://dx.doi.org/10.1016/j.mee.2022.111910
Article Source£ºElsevier BV¡£
Remark£º |