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[Other] Dissolution of CF-Polymer Films at Ultra Low-k Surfaces Using Diluted HF

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sunglin Post time 2024-4-29 14:00:22 | Show all posts |Read mode
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journal£ºECS Journal of Solid State Science and Technology

Authors£ºR. Leitsmann; O. Bohm; Ph. Planitz; C. Radehaus; M. Schaller; M. Schreiber

Published date£º2012--

DOI£º10.1149/2.007201jss

PDF link£ºhttps://syndication.highwire.org/content/doi/10.1149/2.007201jss

Article link£ºhttp://dx.doi.org/10.1149/2.007201jss

Article Source£ºThe Electrochemical Society¡£


Remark£º
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