[SPIE] Comparison of approximate methods for modelling coherence scanning interferometry

JOEY_WU Post time 2024-3-26 21:25:07 | Show all posts |Read mode
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期刊:Modeling Aspects in Optical Metrology IX

作者:Helia Hooshmand-Ziafi;托比亚斯·帕尔;彼得·德·格鲁特;彼得·莱曼;阿塔纳西奥斯·帕帕斯;苏蓉; 理查德·利奇;萨曼塔钢琴

发布日期:2023-8-10

DOI:10.1117/12.2673657

文章链接:http://dx.doi.org/10.1117/12.2673657

文章来源:SPIE


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