[SPIE] Thermal stress of MOEMS accelerometers based on grating interferometric cavity

yu123 Post time 2024-3-22 17:06:07 | Show all posts |Read mode
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期刊:Optical Design and Testing VIII

作者:Weidong Fang;陆千波;白健;陈沛文;韩

丹丹 发布日期:2018-11-5

DOI:10.1117/12.2502273

文章链接:http://dx.doi.org/10.1117/12.2502273



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文章来源:SPIE。

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shuvo.92 Post time 2024-3-22 17:06:08 | Show all posts

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