journal£ºJournal of Micromechanics and Microengineering
Authors£ºNilesh D Mankame; G K Ananthasuresh
Published date£º2001-9-1
DOI£º10.1088/0960-1317/11/5/303
Article link£ºhttp://dx.doi.org/10.1088/0960-1317/11/5/303
Article Source£ºIOP Publishing¡£
Remark£º |