Plasma dynamics in a capacitively coupled discharge driven by a combination of a single high frequency and a tailored low frequency rectangular voltage waveform

Post time 2023-3-16 19:10:59

journal：Plasma Sources Science and Technology

Authors：Shahid Rauf; Manuel Schroeder; Ihor Korolov; Jason Kenney; Julian Schulze

Published date：--

DOI：10.1088/1361-6595/acc12d

Article link：http://dx.doi.org/10.1088/1361-6595/acc12d

Article Source：IOP Publishing。

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[IOP] Plasma dynamics in a capacitively coupled discharge driven by a combination of a single high frequency and a tailored low frequency rectangular voltage waveform

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