journal£ºJournal of Micromechanics and Microengineering
Authors£ºFarah Afiqa Mohd Ghazali; Md Nazibul Hasan; Tariq Rehman; Marwan Nafea; Mohamed Sultan Mohamed Ali; Kenichi Takahata
Published date£º2020-7-1
DOI£º10.1088/1361-6439/ab8832
Article link£ºhttp://dx.doi.org/10.1088/1361-6439/ab8832
Article Source£ºIOP Publishing¡£
Remark£º |