journal£ºSemiconductor Science and Technology
Authors£ºChun Wang; Heng-Tung Hsu; Jui-Lung Lin; You-Chen Weng; Yi-Fan Tsao; Yuan Wang; Edward Yi Chang
Published date£º2023-7-1
DOI£º10.1088/1361-6641/acd13c
PDF link£ºhttps://iopscience.iop.org/article/10.1088/1361-6641/acd13c
Article link£ºhttp://dx.doi.org/10.1088/1361-6641/acd13c
Article Source£ºIOP Publishing¡£
Remark£º |